The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Aug. 07, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Peng Suo, Singapore, SG;
Yu Gu, Singapore, SG;
Guan Huei See, Singapore, SG;
Arvind Sundarrajan, Singapore, SG;
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01F 7/06 (2006.01); H01F 41/04 (2006.01); H01F 17/00 (2006.01); H01F 27/28 (2006.01); H01L 21/48 (2006.01); H01L 23/498 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01F 41/041 (2013.01); H01F 17/0013 (2013.01); H01F 27/2804 (2013.01); H01F 41/046 (2013.01); H01L 21/486 (2013.01); H01L 21/4857 (2013.01); H01L 23/49822 (2013.01); H01L 23/49838 (2013.01); H01L 28/10 (2013.01); H01F 41/04 (2013.01); H01F 2017/0066 (2013.01); H01F 2027/2809 (2013.01);
Abstract
A method of forming a magnetic core on a substrate having a stacked inductor coil includes etching a plurality of polymer layers to form at least one feature through the plurality of polymer layers, wherein the at least one feature is disposed within a central region of a stacked inductor coil formed on the substrate; and depositing a magnetic material within the at least one feature.