The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2022
Filed:
Jul. 17, 2019
Carl Zeiss Microscopy Gmbh, Jena, DE;
Nils Langholz, Apolda, DE;
Jakob Haarstrich, Jena, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
The invention relates to a method for determining the thickness and refractive index of a layer () on a substrate (). The layer () having a layer boundary surface () facing the substrate () and a layer top side () facing away from the substrate (). In said method, the following steps are performed; imaging the layer (), by confocal microscopy, along an optical axis (), determining a point spread function resolved along the optical axis () al the layer boundary surface () and the layer lop side (), determining an apparent thickness of the layer at a lateral point of the layer from the distance between two maxima of the point spread function, determining the widening of a maximum that the point spread function has at the layer boundary surface () relative to the width of the same maximum that the point spread function has at the layer top side (), at the lateral point, and determining the thickness and refractive index of the layer () at the lateral point from the apparent thickness and the widening.