The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2022

Filed:

Jan. 04, 2019
Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Masafumi Hori, Tokyo, JP;

Hiroyuki Komatsu, Tokyo, JP;

Tomohiro Oda, Tokyo, JP;

Hitoshi Osaki, Tokyo, JP;

Takehiko Naruoka, Tokyo, JP;

Assignee:

JSR Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08F 297/02 (2006.01); G03F 7/32 (2006.01); C08K 5/10 (2006.01); C08L 53/00 (2006.01); B82Y 40/00 (2011.01); B82Y 30/00 (2011.01); H01L 21/027 (2006.01); G03F 7/00 (2006.01); C08L 25/04 (2006.01);
U.S. Cl.
CPC ...
C08F 297/02 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C08K 5/10 (2013.01); C08L 25/04 (2013.01); C08L 53/00 (2013.01); G03F 7/0002 (2013.01); G03F 7/325 (2013.01); H01L 21/027 (2013.01); H01L 21/0271 (2013.01);
Abstract

A composition for pattern formation includes a first polymer, a second polymer and a solvent. The first polymer includes: a first block including a first structural unit derived from a substituted or unsubstituted styrene; and a second block including a second structural unit other than the first structural unit. The second polymer includes: the first structural unit; and a group bonding to at least one end of a main chain thereof and including a polar group. The polar group is preferably a hydroxy group or a carboxyl group. A number average molecular weight of the second polymer is preferably no greater than 6,000. A mass ratio of the second polymer to the first polymer is preferably no less than 0.15 and no greater than 0.4. The solvent preferably comprises a compound comprising a hydroxyl group and an alkyl ester group.


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