The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2022

Filed:

Dec. 13, 2019
Applicant:

Koh Young Technology Inc., Seoul, KR;

Inventors:

Dae Sung Koo, Gwangmyeong-si, KR;

Yong Kim, Seoul, KR;

Ki Won Park, Gwangmyeong-si, KR;

Yong Kim, Seoul, KR;

Seo Jeong Jang, Gwangju, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8851 (2013.01); G01N 2021/8887 (2013.01);
Abstract

According to the disclosure, an inspection apparatus determines whether a defect has occurred in a plurality of first inspection objects by comparing a reference range with the measurement value of the plurality of first inspection objects, identifies a plurality of second inspection objects in which a first error has occurred, and a plurality of third inspection objects in which a second error has occurred based on a result of determination whether the defect has occurred, adjusts the reference range based on measurement values of the plurality of second and third inspection objects, determines at least one of an occurrence probability of the first error and the second error based on the adjusted reference range, and displays at least one of a graph indicating the result of determination whether the defect has occurred, the adjusted reference range, the determined occurrence probability of the first error and the second error.


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