The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2022
Filed:
May. 28, 2019
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Gabriel Baralia, Dieburg, DE;
Rainer Becker, Pfungstadt, DE;
Kinga Kornilov, Rossdorf, DE;
Christof Baur, Darmstadt, DE;
Hans Hermann Pieper, Darmstadt, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/38 (2010.01); G01Q 70/08 (2010.01); H01J 37/305 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
G01Q 60/38 (2013.01); G01Q 70/08 (2013.01); H01J 37/3053 (2013.01); H01J 37/317 (2013.01);
Abstract
The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.