The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2022

Filed:

Mar. 10, 2021
Applicant:

Mitutoyo Corporation, Kanagawa, JP;

Inventor:

Yuichiro Yokoyama, Chiba, JP;

Assignee:

MITUTOYO CORPORATION, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02003 (2022.01); G01B 9/02015 (2022.01); G02B 27/10 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02003 (2013.01); G01B 9/02027 (2013.01); G02B 27/1006 (2013.01); G01B 2290/45 (2013.01); G01B 2290/60 (2013.01); G01B 2290/70 (2013.01);
Abstract

A laser interference device includes a measurement laser that outputs a laser beam, a beam splitter that divides the laser beam into a measurement laser beam and a frequency monitor laser beam, a reference laser that outputs a reference laser beam, a frequency detector that detects a beat frequency resulting from interference between the reference laser beam and the frequency monitor laser beam, a wavelength calculator that calculates a wavelength of the frequency monitor laser beam (a wavelength measurement value) on the basis of the beat frequency, a light detector that detects an interference light of the measurement light and the reference light of the measurement laser beam and outputs a light detection signal, and a displacement calculator that calculates a displacement of the measurement mirror by performing an arithmetic process based on the wavelength measurement value and the light detection signal.


Find Patent Forward Citations

Yokoyama, Yuichiro. (2022). Laser interference device (U.S. Patent No. 11353315). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11353315

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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