The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Feb. 19, 2020
Applicant:
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Inventors:
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Primary Examiner:
Int. Cl.
CPC ...
C09J 7/30 (2018.01); C09J 201/08 (2006.01); B32B 27/40 (2006.01); G03F 1/24 (2012.01); G03F 1/48 (2012.01); G03F 1/60 (2012.01); B32B 27/30 (2006.01);
U.S. Cl.
CPC ...
G03F 1/48 (2013.01); B32B 27/304 (2013.01); B32B 27/40 (2013.01); C09J 7/30 (2018.01); C09J 201/08 (2013.01); G03F 1/24 (2013.01); G03F 1/60 (2013.01);
Abstract
The present disclosure provides a photomask, including a front side having a patterned layer, a back side opposite to the front side, a sidewall connecting the front side and the back side, a reflective layer between the front side and the back side, and a polymer layer on the backside of the photomask.