The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2022

Filed:

Jan. 29, 2020
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Daisuke Ishimaru, Koshi, JP;

Katsuya Hashimoto, Koshi, JP;

Yasuhiro Takaki, Koshi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 43/08 (2006.01); F04B 43/00 (2006.01); F04B 43/10 (2006.01);
U.S. Cl.
CPC ...
F04B 43/0072 (2013.01); F04B 43/08 (2013.01); F04B 43/084 (2013.01); F04B 43/10 (2013.01);
Abstract

There is disclosed a hollow tube body used for a liquid feeding member and deformable by pressurization, wherein: an axial cross-section of the tube body has two opposing long side parts and two opposing short side parts; four corner portions formed by the long side parts and the short side parts each have a shape curved to protrude outward; each of the long side parts has a recessed part recessed inward and continuing from the corner portions; and a portion other than the corner portions of each of the short side parts is in a flat shape.


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