The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Jun. 18, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Srinivas Gandikota, Santa Clara, CA (US);
Abhijit Basu Mallick, Palo Alto, CA (US);
Swaminathan Srinivasan, Pleasanton, CA (US);
Rui Cheng, Santa Clara, CA (US);
Susmit Singha Roy, Sunnyvale, CA (US);
Gaurav Thareja, Santa Clara, CA (US);
Mukund Srinivasan, Fremont, CA (US);
Sanjay Natarajan, Portland, OR (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/225 (2006.01); H01L 21/30 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/2257 (2013.01); H01L 21/02043 (2013.01); H01L 21/02164 (2013.01); H01L 21/30 (2013.01); H01L 21/67167 (2013.01);
Abstract
Methods of doping a semiconductor material are disclosed. Some embodiments provide for conformal doping of three dimensional structures. Some embodiments provide for doping with high concentrations of boron for p-type doping.