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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11322329 B1

PDFFull Text
Date of Patent:
May. 03, 2022

Filed:

Aug. 27, 2018

Electron source, method for manufacturing the same, and electron beam device using the same

Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Toshiaki Kusunoki, Tokyo, JP;

Tomihiro Hashizume, Tokyo, JP;

Keigo Kasuya, Tokyo, JP;

Noriaki Arai, Tokyo, JP;

Hiromitsu Seino, Tokyo, JP;

Minoru Kaneda, Tokyo, JP;

Takashi Ohshima, Tokyo, JP;

Soichiro Matsunaga, Tokyo, JP;

Assignee:

HITACHI HIGH-TECH CORPORATION, Tokyo, JP;

Attorney:

Mattingly & Malur, PC

Primary Examiner:

Jason L McCormack

Int. Cl.
CPC ...
H01J 37/065 (2006.01); H01J 37/10 (2006.01); H01J 37/147 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/065 (2013.01); H01J 37/10 (2013.01); H01J 37/1474 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/0473 (2013.01); H01J 2237/06316 (2013.01); H01J 2237/2448 (2013.01);
Abstract

The invention provides an electron source including a columnar chip of a hexaboride single crystal, a metal pipe that holds the columnar chip of the hexaboride single crystal, and a filament connected to the metal pipe at a central portion. The columnar chip of the hexaboride single crystal is formed into a cone shape at a portion closer to a tip than a portion held in the metal pipe, and a tip end portion having the cone shape has a (310) crystal face. Schottky electrons are emitted from the (310) crystal face. According to the invention, it is possible to provide a novel electron source having monochromaticity, long-term stability of an emitter current, and high current density.

Find Patent Forward Citations

Kusunoki, Toshiaki. (2022). Electron source, method for manufacturing the same, and electron beam device using the same (U.S. Patent No. 11322329). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11322329

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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