The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Jan. 22, 2021
Applicants:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Maria Gonano Beurer, Ulm, DE;
Inventors:
Toralf Gruner, Aalen-Hofen, DE;
Joachim Hartjes, Aalen, DE;
Markus Hauf, Ulm, DE;
Gerhard Beurer, Ulm, DE;
Assignees:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/0806 (2022.01); G03F 7/20 (2006.01); G01J 5/08 (2022.01); G01J 5/10 (2006.01); G02B 5/00 (2006.01); G02B 7/04 (2021.01); G02B 27/09 (2006.01);
U.S. Cl.
CPC ...
G01J 5/0806 (2013.01); G01J 5/084 (2013.01); G01J 5/10 (2013.01); G02B 5/001 (2013.01); G02B 7/04 (2013.01); G02B 27/0955 (2013.01); G03F 7/7085 (2013.01); G03F 7/70891 (2013.01);
Abstract
A method and an apparatus for determining the heating state of an optical element in a microlithographic optical system involves at least one contactless sensor which is based on the reception of electromagnetic radiation from the optical element. The radiation range captured by the sensor is varied for the purposes of ascertaining a temperature distribution in the optical element.