The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2022
Filed:
Oct. 09, 2019
Disco Corporation, Tokyo, JP;
Masahiro Wada, Tokyo, JP;
Naohisa Watanabe, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A ring frame holding mechanism holds under suction a lower surface of a ring frame when the ring frame is set at a target position, by using a positioning unit. In positioning the ring frame, air is discharged through a suction cup in a table to thereby form an air layer between the upper surface of the table and the lower surface of the ring frame. This air layer brings the ring frame and the suction cup into a noncontact state and also depresses the suction cup downward so that the upper end of the suction cup becomes flush with the table. Accordingly, the ring frame can be floated over the suction cup, so that the ring frame can be easily moved horizontally. That is, the ring frame can be easily set to the target position and the occurrence of improper positioning can be suppressed.