The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2022
Filed:
Nov. 22, 2019
Globalfoundries U.s. Inc., Santa Clara, CA (US);
Anthony K. Stamper, Burlington, VT (US);
Aaron L. Vallett, Jericho, VT (US);
Steven M. Shank, Jericho, VT (US);
John J. Ellis-Monaghan, Grand Isle, VT (US);
GLOBALFOUNDRIES U.S. INC., Malta, NY (US);
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to vertical field effect transistors (FETS) and methods of manufacture. The structure includes: a substrate material; at least one vertically oriented gate structure extending into the substrate material and composed of a gate dielectric material and conductive gate material; and vertically oriented source/drain regions extending into the substrate material and composed of conductive dopant material and a silicide on the source/drain regions.