The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Nov. 07, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Mehdi Vaez-Iravani, Los Gatos, CA (US);
Christopher Dennis Bencher, Cupertino, CA (US);
Krishna Sreerambhatla, Eindhoven, NL;
Hussein Fawaz, Versoix, CH;
Lior Engel, Sunnyvale, CA (US);
Robert Perlmutter, La Jolla, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method of method of operating a multibeamlet charged particle device is disclosed. In the method, a target attached to a stage is translated, and each step of selecting beamlets, initializing beamlets, and exposing the target is repeated. The step of selecting beamlets includes passing a reconfigurable plurality of selected beamlets through the blanking circuit. The step of initializing beamlets includes pointing each of the selected beamlets in an initial direction. The step of exposing the target includes scanning each of the selected beamlets from the initial direction to a final direction, and irradiating a plurality of regions of the target on the stage with the selected beamlets.