The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2022
Filed:
Apr. 29, 2020
Applicant:
Yangtze Memory Technologies Co., Ltd., Wuhan, CN;
Inventors:
Assignee:
YANGTZE MEMORY TECHNOLOGIES CO., LTD., Wuhan, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/26 (2006.01); G01N 23/223 (2006.01); H01J 49/04 (2006.01); H01J 49/10 (2006.01); H01J 49/24 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01J 49/26 (2013.01); G01N 23/223 (2013.01); H01J 49/0409 (2013.01); H01J 49/0459 (2013.01); H01J 49/105 (2013.01); H01J 49/24 (2013.01); H01L 21/67288 (2013.01); G01N 2223/6116 (2013.01);
Abstract
Embodiments of apparatus and method for testing metal contamination are disclosed. In an example, an apparatus for testing metal contamination includes a chamber in which a test object is placed, a gas supply configured to supply nitrogen gas into the chamber, a pressure controller configured to apply a pressure of at least about 1 torr in the chamber, and a measurement unit configured to measure a concentration of a metal from the test object.