The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2022
Filed:
Apr. 04, 2019
Disco Corporation, Tokyo, JP;
Takashi Mori, Tokyo, JP;
Yoshikuni Migiyama, Tokyo, JP;
Yuta Taniyama, Tokyo, JP;
Mitsuru Ikushima, Tokyo, JP;
Shinichi Namioka, Tokyo, JP;
Makoto Saito, Tokyo, JP;
Emiko Kawamura, Tokyo, JP;
Yoshinori Kakinuma, Tokyo, JP;
Kazuki Sugiura, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A protective sheet disposing method of disposing a protective sheet on a top surface of a wafer in which a device region having a plurality of devices formed thereon and a peripheral surplus region surrounding the device region are formed, the protective sheet disposing method including: a first protective sheet preparing step of preparing a first protective sheet having a non-adhesive portion corresponding to the device region and an adhesive portion having an adhesive layer laid on a periphery of the non-adhesive portion; a protective sheet affixing step of affixing the first protective sheet to the peripheral surplus region; a liquid resin dropping step of dropping a liquid resin onto a region of a second protective sheet; an integrating step of integrating the first protective sheet and the second protective sheet with each other; and a cutting step of cutting the first protective sheet and the second protective sheet.