The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2022
Filed:
Aug. 25, 2020
Applicant:
Pdf Solutions, Inc., San Jose, CA (US);
Inventors:
Tomonori Honda, Santa Clara, CA (US);
Jeffrey Drue David, San Jose, CA (US);
Lin Lee Cheong, San Jose, CA (US);
Assignee:
PDF Solutions, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 11/22 (2006.01); G06F 7/50 (2006.01); H01L 21/66 (2006.01); G06N 20/00 (2019.01); G01R 31/26 (2020.01);
U.S. Cl.
CPC ...
H01L 22/10 (2013.01); G01R 31/2601 (2013.01); G06N 20/00 (2019.01);
Abstract
A maintenance tool for semiconductor process equipment and components. Sensor data is evaluated by machine learning tools to determine when to schedule maintenance action.