The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2022
Filed:
May. 09, 2016
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Tomonori Ohashi, Tokyo, JP;
Toshimitsu Barada, Tokyo, JP;
Hironobu Yamasaki, Tokyo, JP;
Misako Kudo, Tokyo, JP;
Ichiju Sato, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01H 47/00 (2006.01); H01J 37/32 (2006.01); C23C 14/35 (2006.01); H01L 21/3065 (2006.01); C23C 14/34 (2006.01); G01R 19/165 (2006.01); H01F 7/06 (2006.01); H01F 7/20 (2006.01); H01F 13/00 (2006.01); H01F 27/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32669 (2013.01); C23C 14/3407 (2013.01); C23C 14/35 (2013.01); G01R 19/16528 (2013.01); H01F 7/064 (2013.01); H01F 7/20 (2013.01); H01F 13/006 (2013.01); H01F 27/22 (2013.01); H01L 21/3065 (2013.01); H01J 2237/334 (2013.01);
Abstract
The electromagnet device of the present invention comprises: a yoke having an annular groove in a front surface thereof; an annular coil provided in the groove; and an epoxy resin provided on an outer surface of the coil configured to secure the coil to the yoke, wherein there is a clearance between an outer circumferential surface of the groove in the yoke and the epoxy resin provided on an radially outer side of the coil.