The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2022
Filed:
May. 02, 2018
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Kaushik Reddy Vemareddy, San Jose, CA (US);
Shishir Suman, Gaya, IN;
Pavan Kumar Perali, San Jose, CA (US);
Assignee:
KLA-TENCOR CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G06T 5/00 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G06T 5/002 (2013.01); G06T 2207/30148 (2013.01);
Abstract
A noise map is used for defect detection. One or more measurements of intensities at one or more pixels are received and an intensity statistic is determined for each measurement. The intensity statistics are grouped into at least one region and stored with at least one alignment target. A wafer can be inspected with a wafer inspection tool using the noise map. The noise map can be used as a segmentation mask to suppress noise.