The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2022
Filed:
Jul. 26, 2019
Applicant:
Applied Materials Israel Ltd., Rehovot, IL;
Inventors:
Igor Krivts (Krayvitz), Rehovot, IL;
Yoram Uziel, Misgav, IL;
Albert Mariasin, Rehovot, IL;
Nir Merry, Mountain View, CA (US);
Rami Elichai, Ashkelon, IL;
Zvi Goren, Nes-Ziona, IL;
Assignee:
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01); G02B 21/26 (2006.01);
U.S. Cl.
CPC ...
G02B 21/26 (2013.01); G02B 21/008 (2013.01);
Abstract
A method and an integrated system. The integrated system can include an optical inspection unit, a charged particle device, an interface unit, and at least one controller.