The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2022

Filed:

Mar. 25, 2019
Applicant:

Mitsubishi Materials Corporation, Tokyo, JP;

Inventors:

Ryohei Yumoto, Saitama, JP;

Tomoya Oohiraki, Saitama, JP;

Takeshi Kitahara, Saitama, JP;

Yoshiyuki Nagatomo, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05K 1/02 (2006.01); H05K 1/05 (2006.01); H05K 1/09 (2006.01); H05K 3/22 (2006.01); H01L 21/48 (2006.01); H01L 21/52 (2006.01); H01L 23/367 (2006.01); H01L 23/373 (2006.01); H01L 23/473 (2006.01); H05K 3/00 (2006.01); H05K 3/02 (2006.01);
U.S. Cl.
CPC ...
H01L 23/3735 (2013.01); H01L 21/4857 (2013.01); H05K 1/09 (2013.01); H05K 3/0097 (2013.01); H05K 3/022 (2013.01); H05K 3/0052 (2013.01); H05K 2201/0341 (2013.01); H05K 2201/0379 (2013.01); H05K 2203/068 (2013.01);
Abstract

Forming aluminum circuit layers forming an aluminum circuit layers on one surface of a ceramic substrate and forming copper circuit layers are included. The copper circuit layers are formed by laminating copper boards for the circuit layers on the respective aluminum circuit layers, arranging the laminate between a pair of support boards having a convex curved surface at least on one surface so as to face to each other, moving the support boards in a facing direction to press the laminate in a lamination direction, and heating in this pressing state so that the copper boards for the circuit layers are bonded on the aluminum circuit layers respectively by solid phase diffusion. In the step of forming the copper circuit layers, the support boards are arranged so that either one of the convex curved surface is in contact with the adjacent copper boards for the circuit layers in the laminate.


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