The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
May. 07, 2020
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Chia-Yang Wu, Tainan, TW;
Shiu-Ko Jangjian, Tainan, TW;
Keng-Chuan Chang, Hsinchu, TW;
Ting-Siang Su, Hsinchu, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/285 (2006.01); H01L 29/78 (2006.01); H01L 29/165 (2006.01); H01L 29/45 (2006.01); H01L 29/66 (2006.01); H01L 29/40 (2006.01); H01L 29/417 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28518 (2013.01); H01L 21/285 (2013.01); H01L 21/2855 (2013.01); H01L 21/768 (2013.01); H01L 21/76843 (2013.01); H01L 29/165 (2013.01); H01L 29/40 (2013.01); H01L 29/401 (2013.01); H01L 29/41766 (2013.01); H01L 29/45 (2013.01); H01L 29/665 (2013.01); H01L 29/66636 (2013.01); H01L 29/78 (2013.01); H01L 29/7848 (2013.01); H01L 21/76805 (2013.01); H01L 21/76855 (2013.01); H01L 21/76897 (2013.01);
Abstract
A device includes a source/drain (S/D) in a substrate and adjacent to a gate structure, wherein the S/D comprises a protrusion extending from a top surface of the S/D, and the protrusion has a tapered profile. The device further includes a contact plug electrically connected to the protrusion.