The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2022
Filed:
Jul. 15, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Qiwei Liang, Fremont, CA (US);
Xinglong Chen, San Jose, CA (US);
Kien Chuc, San Francisco, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Soonam Park, Sunnyvale, CA (US);
Jang-Gyoo Yang, San Jose, CA (US);
Shankar Venkataraman, San Jose, CA (US);
Toan Tran, San Jose, CA (US);
Kimberly Hinckley, Mountain View, CA (US);
Saurabh Garg, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Gas distribution assemblies are described including an annular body, an upper plate, and a lower plate. The upper plate may define a first plurality of apertures, and the lower plate may define a second and third plurality of apertures. The upper and lower plates may be coupled with one another and the annular body such that the first and second apertures produce channels through the gas distribution assemblies, and a volume is defined between the upper and lower plates.