The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2022

Filed:

Feb. 14, 2020
Applicant:

SI Crystal Gmbh, Nuremberg, DE;

Inventors:

Bernhard Ecker, Nuremberg, DE;

Ralf Mueller, Zirndorf, DE;

Matthias Stockmeier, Egloffstein, DE;

Michael Vogel, Nuremberg, DE;

Arnd-Dietrich Weber, Forchheim, DE;

Assignee:

SiCrystal GmbH, Nuremberg, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B 23/06 (2006.01); C23C 14/06 (2006.01); C23C 14/24 (2006.01); C30B 29/36 (2006.01);
U.S. Cl.
CPC ...
C30B 23/06 (2013.01); C23C 14/0635 (2013.01); C23C 14/243 (2013.01); C30B 29/36 (2013.01);
Abstract

A bulk SiC single crystal is produced by placing an SiC seed crystal in a crystal growth region of a growth crucible, and introducing SiC source material into an SiC reservoir region, and the bulk SiC single crystal is grown on from an SiC growth gas phase by deposition. The growth crucible is surrounded by an insulation that extends rotationally symmetrically and axially towards the central middle longitudinal axis. The insulation has mutually concentric insulation cylinder components and the insulation is notionally divided into insulation ring segments that are in turn notionally divided into volume elements. The insulation cylinder components are selected and positioned relative to one another such that every volume element of the insulation ring segment in question has a volume element density varying by not more than 10% from an average insulation ring segment density of the insulation ring segment in question.


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