The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 22, 2022

Filed:

Jun. 05, 2020
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Jun Yuan, San Diego, CA (US);

Peijie Feng, San Diego, CA (US);

Stanley Seungchul Song, San Diego, CA (US);

Kern Rim, San Diego, CA (US);

Assignee:

QUALCOMM Incorporated, San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 21/8234 (2006.01); H01L 29/08 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42392 (2013.01); H01L 21/823412 (2013.01); H01L 29/0673 (2013.01); H01L 29/0847 (2013.01);
Abstract

Gate-all-around (GAA) transistors with an additional bottom channel for reduced parasitic capacitance and methods of fabricating the same include one or more channels positioned between a source region and a drain region. The one or more channels, which may be nanowire or nanoslab semiconductors, are surrounded by gate material. The GAA transistor further includes an additional semiconductor channel between a bottom section of a gate material and a silicon on insulator (SOI) substrate in a GAA transistor. This additional channel, sometimes referred to as a bottom channel, may be thinner than other channels in the GAA transistor and may have a thickness less than its length.


Find Patent Forward Citations

Loading…