The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2022
Filed:
Sep. 12, 2019
Applicant:
Winbond Electronics Corp., Taichung, TW;
Inventors:
Assignee:
Winbond Electronics Corp., Taichung, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 27/11556 (2017.01); H01L 29/788 (2006.01); H01L 29/66 (2006.01); H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11556 (2013.01); H01L 21/823437 (2013.01); H01L 29/66825 (2013.01); H01L 29/788 (2013.01);
Abstract
Provided is a memory device including a substrate, a plurality of stack structures, a spacer, a dielectric layer, and a plurality of contact plugs. The stack structures are disposed on the substrate. The spacer is embedded in the stack structures, so that a width of an upper portion of the stack structures is less than a width of a lower portion thereof. The dielectric layer conformally covers the stack structures and the spacer. The contact plugs are respectively disposed on the substrate between the stack structures.