The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Feb. 07, 2019
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Carl Zeiss Sms Ltd., D.N. Misgav, IL;
Markus Seesselberg, Aalen, DE;
Vladimir Dmitriev, Tzurit, IL;
Joachim Welte, Darmstadt, DE;
Uri Stern, Kiryat Tivon, IL;
Tomer Cohen, Moshav Liman, IL;
Erez Graitzer, Gilon, IL;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Carl Zeiss SMS Ltd., D.N. Misgav, IL;
Abstract
An optical system includes a scanning unit, a first lens-element group including at least a first lens element, and a focusing unit which is designed to focus beams onto a focus, wherein the focusing unit includes a second lens-element group including at least a second lens element and an imaging lens. The imaging lens further includes a pupil plane and a wavefront manipulator. The wavefront manipulator is arranged in the pupil plane of the imaging lens or in a plane that is conjugate to the pupil plane, or the scanning unit of the optical system is arranged in a plane that is conjugate to the pupil plane and the wavefront manipulator is arranged upstream of the scanning unit in the light direction. The focus of the second lens-element group lies in the pupil plane of the imaging lens in all focal positions of the focusing unit.