The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2022
Filed:
Apr. 06, 2020
International Business Machines Corporation, Armonk, NY (US);
Chanro Park, Clifton Park, NY (US);
Koichi Motoyama, Clifton Park, NY (US);
Kenneth Chun Kuen Cheng, Albany, NY (US);
Somnath Ghosh, Clifton Park, NY (US);
Chih-Chao Yang, Glenmont, NY (US);
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Abstract
Interconnect structures and methods for forming the interconnect structures generally include a subtractive etching process to form a fully aligned top via and metal line interconnect structure. The interconnect structure includes a top via and a metal line formed of an alternative metal other than copper or tungsten. A conductive etch stop layer is intermediate the top via and the metal line. The top via is fully aligned to the metal line.