The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 08, 2022

Filed:

Oct. 10, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Koichi Motoyama, Clifton Park, NY (US);

Cornelius Brown Peethala, Slingerlands, NY (US);

Christopher J. Penny, Saratoga Springs, NY (US);

Nicholas Anthony Lanzillo, Troy, NY (US);

Lawrence A. Clevenger, Saratoga Springs, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76885 (2013.01); H01L 21/76816 (2013.01); H01L 21/76877 (2013.01); H01L 23/5226 (2013.01); H01L 23/5283 (2013.01); H01L 21/76804 (2013.01); H01L 21/76846 (2013.01); H01L 23/53238 (2013.01);
Abstract

Embodiments of the present invention are directed to fabrication method and resulting structures for forming interconnects using a conductive spacer configured to prevent a short between a via and an adjacent line. In a non-limiting embodiment of the invention, a first conductive line and a second conductive line are formed in a metallization layer. A conductive spacer is formed on the first conductive line and a conductive via is formed on a surface of the conductive spacer. The conductive via is positioned such that the conductive spacer is between the first conductive line and the conductive via. A height of the conductive spacer is selected to provide a predetermined distance from the conductive via to the second conductive line. The predetermined distance from the conductive via to the second conductive line is sufficient to prevent a short between the conductive via and the second conductive line.


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