The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2022
Filed:
Jul. 21, 2020
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/45 (2006.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01); G01N 21/55 (2014.01); G03F 7/20 (2006.01); G01N 21/31 (2006.01); G02B 21/00 (2006.01); G02B 21/08 (2006.01); G01B 11/06 (2006.01); G01J 3/453 (2006.01); G02B 21/06 (2006.01); G02B 21/18 (2006.01); G02B 21/36 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01B 11/0675 (2013.01); G01J 3/453 (2013.01); G01N 21/31 (2013.01); G01N 21/45 (2013.01); G01N 21/55 (2013.01); G01N 21/956 (2013.01); G02B 21/0016 (2013.01); G02B 21/0056 (2013.01); G02B 21/06 (2013.01); G02B 21/082 (2013.01); G02B 21/18 (2013.01); G02B 21/365 (2013.01); G03F 7/70633 (2013.01); H01L 21/67259 (2013.01); H01L 22/12 (2013.01); G01N 2201/066 (2013.01); G01N 2201/0633 (2013.01); G01N 2201/0636 (2013.01);
Abstract
A device and method for expediting spectral measurement in metrological activities during semiconductor device fabrication through interferometric spectroscopy of white light illumination during calibration, overlay, and recipe creation.