The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2022
Filed:
Aug. 08, 2018
Asml Netherlands B.v., Veldhoven, NL;
Richard Johannes Franciscus Van Haren, Waalre, NL;
Leon Paul Van Dijk, Eindhoven, NL;
Ilya Malakhovsky, Eindhoven, NL;
Ronald Henricus Johannes Otten, Rosmalen, NL;
Mahdi Sadeghinia, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Methods and associated apparatus for reconstructing a free-form geometry of a substrate, the method including: positioning the substrate on a substrate holder configured to retain the substrate under a retaining force that deforms the substrate from its free-form geometry; measuring a height map of the deformed substrate; and reconstructing the free-form geometry of the deformed substrate based on an expected deformation of the substrate by the retaining force and the measured height map.