The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 18, 2022

Filed:

Dec. 07, 2017
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Yoshiyuki Kobayashi, Miyagi, JP;

Naoki Yoshii, Tokyo, JP;

Katsuji Kadosawa, Yamanashi, JP;

Kimitomo Kaji, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01M 4/04 (2006.01); C23C 4/134 (2016.01); C23C 4/08 (2016.01); H01G 11/86 (2013.01); H01M 4/1395 (2010.01); H05H 1/34 (2006.01); H05H 1/42 (2006.01);
U.S. Cl.
CPC ...
C23C 4/134 (2016.01); C23C 4/08 (2013.01); H01G 11/86 (2013.01); H01M 4/0419 (2013.01); H01M 4/1395 (2013.01); H05H 1/34 (2013.01); H05H 1/42 (2013.01);
Abstract

There is provision of a plasma spraying device including a supplying section configured to convey feedstock powder with a plasma generating gas, and to inject the feedstock powder and the plasma generating gas from an opening of a tip; a plasma generating section configured to generate a plasma by decomposing the injected plasma generating gas using electric power of 500 W to 10 kW; and a chamber causing the supplying section and the plasma generating section to be an enclosed region, which is configured to deposit the feedstock powder on a workpiece by melting the feedstock powder by the plasma generated in the enclosed region. The feedstock powder is any one of lithium (Li), aluminum (Al), copper (Cu), silver (Ag), and gold (Au). A particle diameter of the feedstock powder is between 1 μm and 50 μm.


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