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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11221557 B1

PDFFull Text
Date of Patent:
Jan. 11, 2022

Filed:

May. 23, 2019

Resist composition, method of forming resist pattern, compound, and acid generator

Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Inventors:

Takuya Ikeda, Kawasaki, JP;

Masahiro Shiosaki, Kawasaki, JP;

Masatoshi Arai, Kawasaki, JP;

Yoshitaka Komuro, Kawasaki, JP;

Assignee:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Attorney:

Knobbe Martens Olson & Bear LLP

Primary Examiner:

Amanda C Walke

Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/039 (2006.01); C07C 309/06 (2006.01); C07D 339/08 (2006.01); C07C 381/12 (2006.01); C07C 309/12 (2006.01); C07D 335/16 (2006.01); C07D 327/08 (2006.01); C07D 333/76 (2006.01); C07D 209/56 (2006.01); G03F 7/038 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/38 (2006.01); G03F 7/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 309/06 (2013.01); C07C 309/12 (2013.01); C07C 381/12 (2013.01); C07D 209/56 (2013.01); C07D 327/08 (2013.01); C07D 333/76 (2013.01); C07D 335/16 (2013.01); C07D 339/08 (2013.01); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01); C07C 2603/88 (2017.05); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2004 (2013.01); G03F 7/2037 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01);
Abstract

A resist composition containing a compound represented by the general formula (bd1-1), (bd1-2) or (bd1-3); in the formula, Rxto Rxrepresent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure; Ryto Ryrepresent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, Rzto Rzrepresent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure. At least one of Rxto Rx, Ryto Ryand Rzto Rzhas an anion group, Mrepresents a sulfonium cation having a sulfonyl group, Rto Reach independently represent a monovalent organic group; provided that at least one of Rto Ris an organic group having an acid dissociable group; and Mrepresents an m-valent organic cation having an electron-withdrawing group.

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