The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2021
Filed:
May. 15, 2020
Fujian Jinhua Integrated Circuit CO Ltd, Quanzhou, CN;
Hsienshih Chu, Quanzhou, CN;
Dehao Huang, Quanzhou, CN;
Yunfan Chou, Quanzhou, CN;
Yaoguang Xu, Quanzhou, CN;
Yucheng Tung, Quanzhou, CN;
Fujian Jinhua Integrated Circuit Co., Ltd., Quanzhou, CN;
Abstract
Provided is a shallow trench isolating structure and a semiconductor device. The trench isolating structure is formed in a substrate and includes a first and a second part. The first part has a first side wall extending from a surface of the substrate to a location, the first side wall has a first slope, and a surface of it has a first roughness. The second part has a second side wall extending from the first side wall to a location, the second side wall has a second slope, and a surface of it has a second roughness, the second slope is greater than the first slope, and the second roughness is greater than the first roughness. The disclosure solves the problem that it is difficult to fill the shallow trench isolating structure, and an undersized available space of the surface of the substrate may not be caused.