The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 14, 2021

Filed:

Mar. 31, 2020
Applicant:

Imec Vzw, Leuven, BE;

Inventors:

Anabela Veloso, Leuven, BE;

Trong Huynh Bao, Leuven, BE;

Julien Ryckaert, Schaerbeek, BE;

Raf Appeltans, Haasrode, BE;

Assignee:

IMEC vzw, Leuven, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 27/088 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823487 (2013.01); H01L 21/823431 (2013.01); H01L 21/823456 (2013.01); H01L 27/0886 (2013.01);
Abstract

A method of fabricating a semiconductor device is disclosed. In one aspect, the method includes forming, in a vertical channel field-effect transistor (FET) device region, a vertical channel FET device including a first semiconductor structure including a lower source/drain portion, an upper source/drain portion, a first channel portion extending vertically and intermediate the source/drain portions and a gate structure extending along the channel portion and, in a horizontal channel FET device region, a horizontal channel FET device comprising a second semiconductor structure including a first source/drain portion, a second source/drain portion, a second channel portion extending horizontally and intermediate the source/drain portions, and a gate structure extending across the channel portion.


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