The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2021
Filed:
Sep. 16, 2020
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Juying Dou, San Jose, CA (US);
Zheng Fan, Beijing, CN;
Tzu-Yi Kuo, Hsinchu, TW;
Zhongwei Chen, San Jose, CA (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/073 (2006.01); H01J 9/04 (2006.01); H01J 37/065 (2006.01); H01J 1/304 (2006.01); H01J 1/14 (2006.01); H01J 9/02 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/073 (2013.01); H01J 1/14 (2013.01); H01J 1/304 (2013.01); H01J 9/025 (2013.01); H01J 9/042 (2013.01); H01J 37/065 (2013.01); H01J 37/26 (2013.01); H01J 2201/196 (2013.01); H01J 2201/30403 (2013.01); H01J 2201/30426 (2013.01); H01J 2201/30449 (2013.01); H01J 2201/30484 (2013.01); H01J 2201/30492 (2013.01); H01J 2209/0223 (2013.01); H01J 2237/06308 (2013.01); H01J 2237/06316 (2013.01); H01J 2237/06341 (2013.01);
Abstract
Electron emitters and method of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.