The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 14, 2021

Filed:

Nov. 03, 2017
Applicant:

Koh Young Technology Inc., Seoul, KR;

Inventors:

Dae Sung Koo, Gwangmyeong-si, KR;

Yong Kim, Seoul, KR;

Ki Won Park, Gwangmyeong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01N 35/00 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8851 (2013.01); G01N 2021/8854 (2013.01); G01N 2021/8887 (2013.01); G01N 2035/0091 (2013.01);
Abstract

A method for adjusting a condition for determining a quality of an inspection object comprises: acquiring measurement values for the structures of a plurality of inspection objects; determining whether each of the plurality of inspection objects is good or defective by comparing error values of the measurement values with respect to design values with a predetermined reference value; identifying one or more inspection objects in which determination error has occurred among the plurality of inspection objects; generating and outputting an inspection result graph including the number of inspection objects according to the error values, the reference value, and the number of the one or more inspection objects in which the determination error has occurred; updating the reference value according to a graphical input; and redetermining whether each of the plurality of inspection objects is good or defective by comparing the error values with the updated reference value.


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