The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2021
Filed:
Aug. 30, 2018
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Santosh Kumar, Milpitas, CA (US);
Pavan Kumar Perali, San Ramon, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G01N 23/2251 (2018.01); H01L 21/66 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0006 (2013.01); G01N 23/2251 (2013.01); G01N 2223/6116 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20021 (2013.01); G06T 2207/30148 (2013.01); H01L 21/027 (2013.01); H01L 22/12 (2013.01); H01L 22/30 (2013.01);
Abstract
Techniques and systems to achieve more accurate design alignment to an image by improved pixel-to-design alignment (PDA) target selection are disclosed. PDA targets in an image frame of a die can be biased to include a hotspot location in one of the PDA targets. The PDA targets can be evaluated for repetitive patterns by analyzing the uniqueness of the points used as the PDA targets.