The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Dec. 02, 2020
Applied Materials Israel Ltd., Rehovot, IL;
Itay Asulin, Rehovot, IL;
Ofer Yuli, Rehovot, IL;
Lavy Shavit, Rehovot, IL;
Yoram Uziel, Misgav, IL;
Guy Eytan, Kidron, IL;
Natan Schlimoff, Rehovot, IL;
Igor Krivts (Krayvitz), Rehovot, IL;
Jacob Levin, Rehovot, IL;
Israel Avneri, Ramat-Gan, IL;
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Abstract
A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.