The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Oct. 03, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Raman K. Nurani, Chennai, IN;
Anantha R. Sethuraman, Palo Alto, CA (US);
Koushik Ragavan, Chennai, IN;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G06N 7/08 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G03F 7/705 (2013.01); G03F 7/70508 (2013.01); G06N 7/08 (2013.01); H01L 22/20 (2013.01); H01L 22/12 (2013.01);
Abstract
Implementations described herein generally relate to improving silicon wafer manufacturing. In one implementation, a method includes receiving data from one or more manufacturing tools about a manufacturing process of a silicon wafer. The method further includes determining, based on the data, predictive information about a quality of the silicon wafer. The method further includes providing the predictive information to a manufacturing system, wherein the predictive information is used to determine whether to take corrective action.