The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 23, 2021

Filed:

Jun. 13, 2017
Applicant:

Nissan Chemical Corporation, Tokyo, JP;

Inventors:

Hiroshi Ogino, Toyama, JP;

Tomoyuki Enomoto, Toyama, JP;

Tetsuya Shinjo, Toyama, JP;

Kazuhiro Sawada, Toyama, JP;

Shunsuke Moriya, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); C09J 5/06 (2006.01); C09J 183/04 (2006.01); H01L 21/304 (2006.01); H01L 21/768 (2006.01); C09J 11/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); C09J 5/06 (2013.01); C09J 11/06 (2013.01); C09J 183/04 (2013.01); H01L 21/304 (2013.01); H01L 21/76898 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68386 (2013.01);
Abstract

An adhesive can be easily peeled off after polishing the back face of a wafer, which has heat resistance and can be easily washed off. An adhesive for peelably adhering between a support and a circuit-bearing face of a wafer and thereby processing a back face of the wafer, a peeling face upon peeling becomes selectable according to heating from the support side or wafer side when the adhesive is cured. The adhesive includes a component (A) curing by hydrosilylation reaction and a component (B) containing a polydimethylsiloxane. A peeling method including forming an adhesion layer by applying the adhesive to a surface of a first substrate, bonding a surface of a second substrate to the adhesion layer, curing the adhesion layer by heating from the first substrate side to form a laminate, processing the laminate, and peeling off between the first substrate and the adhesion layer.


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