The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 23, 2021

Filed:

Jan. 16, 2020
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Toyohiro Aoki, Kanagawa, JP;

Takashi Hisada, Tokyo, JP;

Eiji Nakamura, Kanagawa, JP;

Masao Tokunari, Kanagawa, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/42 (2006.01); H01L 23/00 (2006.01); G02B 6/122 (2006.01); G02B 6/12 (2006.01); G02B 6/13 (2006.01); H01L 21/027 (2006.01); H01L 33/62 (2010.01); H01L 33/58 (2010.01); H01L 31/02 (2006.01); H01L 31/0232 (2014.01);
U.S. Cl.
CPC ...
G02B 6/4232 (2013.01); G02B 6/12002 (2013.01); G02B 6/1221 (2013.01); G02B 6/13 (2013.01); G02B 6/4214 (2013.01); H01L 21/027 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 24/16 (2013.01); H01L 24/81 (2013.01); G02B 2006/12069 (2013.01); G02B 2006/12123 (2013.01); H01L 24/05 (2013.01); H01L 31/02005 (2013.01); H01L 31/02327 (2013.01); H01L 33/58 (2013.01); H01L 33/62 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/05124 (2013.01); H01L 2224/05147 (2013.01); H01L 2224/11005 (2013.01); H01L 2224/1134 (2013.01); H01L 2224/1141 (2013.01); H01L 2224/1181 (2013.01); H01L 2224/11602 (2013.01); H01L 2224/11618 (2013.01); H01L 2224/13023 (2013.01); H01L 2224/1357 (2013.01); H01L 2224/13139 (2013.01); H01L 2224/13144 (2013.01); H01L 2224/13147 (2013.01); H01L 2224/13582 (2013.01); H01L 2224/13664 (2013.01); H01L 2224/16237 (2013.01); H01L 2224/81191 (2013.01); H01L 2224/81815 (2013.01); H01L 2924/12041 (2013.01); H01L 2924/12043 (2013.01); H01L 2933/0066 (2013.01);
Abstract

A technique for fabricating bumps on a substrate is disclosed. A substrate that includes a set of pads formed on a surface thereof is prepared. A bump base is formed on each pad of the substrate. Each bump base has a tip extending outwardly from the corresponding pad. A resist layer is patterned on the substrate to have a set of holes through the resist layer. Each hole is aligned with the corresponding pad and having space configured to surround the tip of the bump base formed on the corresponding pad. The set of the holes in the resist layer is filled with conductive material to form a set of bumps on the substrate. The resist layer is stripped from the substrate with leaving the set of the bumps.


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