The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 16, 2021

Filed:

Jun. 09, 2020
Applicant:

Park Systems Corp., Gyeonggi-do, KR;

Inventors:

Sang-il Park, Gyeonggi-do, KR;

Yonghan Lee, Gyeonggi-do, KR;

Ahjin Jo, Seoul, KR;

Assignee:

PARK SYSTEMS CORP., Gyeonggi-Do, KR;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 70/02 (2010.01); G01Q 60/38 (2010.01);
U.S. Cl.
CPC ...
G01Q 70/02 (2013.01); G01Q 60/38 (2013.01);
Abstract

A chip carrier exchanging device receives a used chip carrier from a head of a scanning probe microscope that performs measurement by using the chip carrier configured such that a measurement means is attached to a carrier made of a magnetic material, and the chip carrier exchanging device supplies a new chip carrier to the head. The chip carrier exchanging device includes: a permanent magnet; a magnetism flow connecting unit made of a magnetic material that allow magnetism to flow therethrough, the magnetism flow connecting unit being configured to fix the chip carrier by exerting a magnetic effect on the carrier; and a drive unit configured to operate the permanent magnet to change magnetic force between the carrier and the magnetism flow connecting unit.


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