The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
Feb. 04, 2021
Sigray, Inc., Concord, CA (US);
Wenbing Yun, Walnut Creek, CA (US);
Sylvia Jia Yun Lewis, San Francisco, CA (US);
Janos Kirz, Berkeley, CA (US);
Sigray, Inc., Concord, CA (US);
Abstract
An x-ray imaging/inspection system includes an x-ray source having a plurality of sub-sources in thermal communication with a substrate. The system further includes a first grating positioned to receive at least some of the x-rays from the x-ray source, a stage configured to hold a sample positioned to receive at least some of the x-rays from the x-ray source, at least one x-ray detector, and a second grating having periodic structures. The x-ray source, the first grating, and the second grating are configured such that a ratio of a pitch pof the plurality of sub-sources to a pitch pof the periodic structures of the second grating is substantially equal to a ratio of a distance dbetween the plurality of sub-sources and the first grating and a distance dbetween the first grating and the second grating: (p/p)=(d/d).