The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 09, 2021

Filed:

Sep. 26, 2019
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Poornika Fernandes, Murphy, TX (US);

David Matthew Curran, Plano, TX (US);

Stephen Arion Meisner, Allen, TX (US);

Bhaskar Srinivasan, Allen, TX (US);

Guruvayurappan S. Mathur, Plano, TX (US);

Scott William Jessen, Allen, TX (US);

Shih Chang Chang, Allen, TX (US);

Russell Duane Fields, Richardson, TX (US);

Thomas Terrance Lynch, Allen, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 28/60 (2013.01); H01L 21/0214 (2013.01); H01L 21/0217 (2013.01); H01L 21/02164 (2013.01); H01L 21/02274 (2013.01);
Abstract

In some examples, an integrated circuit comprises a substrate; a first metal layer and a second metal layer positioned above the substrate; a first composite dielectric layer located on the first metal layer, wherein the first composite dielectric layer comprises a first anti-reflective coating; a second composite dielectric layer positioned on the second metal layer, wherein the second composite dielectric layer comprises a second anti-reflective coating; and a capacitor metal layer disposed over the first composite dielectric layer.


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