The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2021
Filed:
Feb. 06, 2019
Versum Materials Us, Llc, Tempe, AZ (US);
Raymond Nicholas Vrtis, Tempe, AZ (US);
Robert Gordon Ridgeway, Tempe, AZ (US);
Jennifer Lynn Anne Achtyl, Tempe, AZ (US);
William Robert Entley, Tempe, AZ (US);
Dino Sinatore, Tempe, AZ (US);
Kathleen Esther Theodorou, Tempe, AZ (US);
Versum Materials US, LLC, Tempe, AZ (US);
Abstract
According to a chemical vapor deposition method for depositing an organosilicate film on a substrate, a gaseous organosilicate composition is introduced into a vacuum chamber. The gaseous organosilicate composition includes a first silicon-containing precursor selected from an organosilane and an organosiloxane, and further includes at least one second silicon-containing precursor selected from compounds represented by the structure of Formula I:RSi(OR)  (I),