The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2021
Filed:
Jun. 29, 2018
Applicant:
Jiangsu Jitri Micro-nano Automation Institute Co., Ltd., Suzhou, CN;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 30/02 (2010.01); G01Q 30/04 (2010.01); H01J 37/28 (2006.01); G01Q 10/06 (2010.01); G01Q 60/30 (2010.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); G01Q 10/06 (2013.01); G01Q 30/02 (2013.01); G01Q 30/04 (2013.01); G01Q 60/30 (2013.01); H01J 2237/2583 (2013.01); H01J 2237/2814 (2013.01);
Abstract
A method discloses topography information extracted from scanning electron microscope (SEM) images to determine the atomic force microscope (AFM) image scanning speed at each sampling point or in each region on a sample. The method includes the processing of SEM images to extract possible topography features and create a feature metric map (step 1), the conversion of the feature metric map into AFM scan speed map (step 2), and performing AFM scan according to the scan speed map (step 3). The method enables AFM scan with higher scan speeds in areas with less topography feature, and lower scan speeds in areas that are rich in topography features.