The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2021
Filed:
Feb. 28, 2020
Asml Netherlands B.v., Veldhoven, NL;
Dennis Herman Caspar Van Banning, Veldhoven, NL;
Jeroen Gerard Gosen, Veldhoven, NL;
Maarten Lambertus Henricus Ter Heerdt, Veldhoven, NL;
Edwin Cornelis Kadijk, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An e-beam inspection tool is disclosed, the tool comprising, an electron optics system configured to generate an electron beam, an object table configured to hold a specimen, a positioning device configured to position the object table, the positioning device comprising an actuator, wherein the positioning device further comprises a heating device configured to generate a heat load and a heat load controller to control the generated heat load at least partly based on an actuator heat load generated in the actuator.