The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 19, 2021

Filed:

Sep. 22, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Yvonne Lin, Saratoga, CA (US);

Da-Wen Lin, Hsinchu, TW;

Peter Huang, Pleasanton, CA (US);

Paul Rousseau, Sunnyvale, CA (US);

Sheng-Jier Yang, Zhubei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 27/088 (2006.01); H01L 29/06 (2006.01); H01L 21/8234 (2006.01); G05F 3/16 (2006.01); G05F 1/46 (2006.01); G05F 1/595 (2006.01); G05F 3/24 (2006.01);
U.S. Cl.
CPC ...
G05F 3/16 (2013.01); G05F 1/465 (2013.01); G05F 1/468 (2013.01); G05F 1/595 (2013.01); H01L 21/823431 (2013.01); H01L 21/823475 (2013.01); H01L 27/0886 (2013.01); H01L 29/0649 (2013.01); H01L 29/0657 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01); H01L 29/7831 (2013.01); G05F 3/247 (2013.01);
Abstract

Some embodiments relate to a device disposed on a semiconductor substrate. The semiconductor substrate includes a base region and a crown structure extending upwardly from the base region. The crown structure is narrower than the base region. A plurality of fins extend upwardly from an upper surface of the crown structure. A gate dielectric material is disposed over upper surfaces and sidewalls of the plurality of the fins. A conductive electrode is disposed along sidewall portions of the gate dielectric material. An uppermost surface of the conductive electrode resides below the upper surfaces of the plurality of fins.


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