The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Apr. 07, 2020
Macronix International Co., Ltd., Hsinchu, TW;
Wei-Liang Lin, Taipei, TW;
Wen-Jer Tsai, Hualien County, TW;
MACRONIX INTERNATIONAL CO., LTD., Hsinchu, TW;
Abstract
A 3D memory device includes a substrate, stacked structures formed on the substrate, common source line (CSL) contacts, and NOR flash memories. The substrate has CSLs and memory cell regions alternately arranged along one direction in parallel. The stacked structures are located on the memory cell regions and include a ground select line (GSL) layer and a word line (WL) layer. The CSL contacts are disposed along another direction to connect the CSLs. The NOR flash memories are disposed in the memory cell regions, and each of the NOR flash memories includes at least an epitaxial pillar through the stacked structure, a charge-trapping layer located between the epitaxial pillar and the WL layer, and a high-k layer located between the charge-trapping layer and the WL layer. The epitaxial pillar has a retracted sidewall at a position passing through the GSL layer.